Laser-induced breakdown spectroscopy (LIBS) has been applied mainly to bulk analysis of solids, liquids, and gases and less frequently for elemental microanalysis of solid surfaces. A micro-LIBS device devoted to analysis of the distribution of elements on surfaces is described. This device offers rapid access with a 3-microm spatial resolution to the microchemical structures of both conductive and nonconductive samples. Quantitative microchemical results of applications to ceramics are reported. By the use of a time-resolved acquisition spectrum, cerium in a uranium matrix was characterized with a cerium detection limit of 1.14%. Calibration curves obtained with manipulations during 1 year facilitated evaluations of reproducibility and repeatability. A 2% single-shot repeatability with a calibration reproducibility of approximately 7% is reported.
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