Low pressure dielectric barrier discharge was used to study the formation of XeCl excimer in a mixture of Xe/Cl2 in the range of 70-1,330 Pa. The fluorescence emission spectra in the range of 285-315 nm at different pressure and ratio of Xe/Cl2 were measured. The results indicate that near 308 nm the emission intensities of XeCl formed under the experimental conditions varied with different total pressure and ratio of Xe/Cl2, and the formation efficiency of XeCl excimer reached maximum value at the ratio of 4:1.
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