[Fabrication of Y2O3-doped CeO2 ultrathin film by newly developed component-controllable Langmuir-Blodgett method].

A fabrication technique of component-controllable multi-component ultrathin ceramic films has been developed by a promising LB method. The precursor of Y2O3-doped CeO2 (YDC) ultrathin film was prepared with cerium IV 2,2,6,6-tetramethyl-heptanedionate (Ce(tmhd)4) and yttrium 2,2,6,6-tetramethylheptanedionate (Y(tmRd)3) as "surface ions" on subphase surface instead of traditional "subphase ions". The YDC film was successfully fabricated after ultraviolet/ozone treatment and annealing in oxygen ambience with the precursor. XPS results proved that the surface of the fired film contained mainly Ce, O and Y and that the elemental ratio of Y/Ce was well controlled.