Determination of the composition of light thin films with artificial neural network analysis of Rutherford backscattering experiments.

AlO(x)N(y) ultrathin films are used as insulating layers in advanced microelectronic devices. Structural characterization of these films is often done by the Rutherford backscattering (RBS) analysis. The RBS analysis of these oxinitrides is a difficult task since the relevant signals of the spectrum are washed out by the large substrate background and a considerable time is required for an analyst to characterize the sample. In this work we developed specialized artificial neural networks that are able to perform a fast and efficient analysis of the data. The results are in good agreement with traditional methods.