Round robin test for depth profiling of SiO2/Si multilayer.

Anal Sci

Materials Characterization Division, National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology, AIST Tsukuba Central 5, Higashi 1-1, Tsukuba, Ibaraki 305-8565, Japan.

Published: December 2002

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http://dx.doi.org/10.2116/analsci.18.1395DOI Listing

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