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MEMS Resonant Beam with Outstanding Uniformity of Sensitivity and Temperature Distribution for Accurate Gas Sensing and On-Chip TGA.
Sensors (Basel)
April 2024
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Micromechanical resonators have aroused growing interest as biological and chemical sensors, and microcantilever beams are the main research focus. Recently, a resonant microcantilever with an integrated heater has been applied in on-chip thermogravimetric analysis (TGA). However, there is a strong relationship between the mass sensitivity of a resonant microcantilever and the location of adsorbed masses.
View Article and Find Full Text PDFAn Engineering Method for Resonant Microcantilever Using Double-Channel Excitation and Signal Acquisition Based on LabVIEW.
Micromachines (Basel)
April 2023
School of Microelectronics, Shanghai University, Shanghai 200444, China.
Resonant microcantilevers have the advantages of ultra-high heating rates, analysis speed, ultra-low power consumption, temperature programming, and trace sample analysis when applied in TGA. However, the current single-channel testing system for resonant microcantilevers can only detect one sample at a time, and need two program heating tests to obtain the thermogravimetric curve of a sample. In many cases, it is desirable to obtain the thermogravimetric curve of a sample with a single-program heating test and to simultaneously detect multiple microcantilevers for testing multiple samples.
View Article and Find Full Text PDFA review of piezoelectric MEMS sensors and actuators for gas detection application.
Discov Nano
February 2023
Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia.
Article Synopsis
- Piezoelectric microelectromechanical systems (piezo-MEMS) are effective for sensitive gas detection and include various types like microcantilevers and surface acoustic waves.
- The characteristics of piezo-MEMS gas sensors include their small size, ability to integrate with circuits, and fabrication flexibility, making them suitable for detecting low-level gas concentrations.
- The study explores different gas sensor types based on piezoelectricity, focusing on principles of operation, materials used, and design parameters for optimal performance.
Cooperative Characterization of TEM and Cantilever-TGA to Optimize Calcination Conditions of MnO Nanowire Precursors.
Nano Lett
March 2023
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai200050, People's Republic of China.
Calcination plays a vital role during material preparation. However, the calcination conditions have often been determined empirically or have been based on trial and error. Herein we present a cooperative characterization approach to optimize calcination conditions by gas-cell TEM in collaboration with microcantilever-based thermogravimetric analysis (cantilever-TGA) techniques.
View Article and Find Full Text PDFSub-Nanometer Acoustic Vibration Sensing Using a Tapered-Tip Optical Fiber Microcantilever.
Sensors (Basel)
January 2023
LaserLab, Department of Physics and Astronomy, VU University, De Boelelaan 1081, 1081 HV Amsterdam, The Netherlands.
We demonstrate a highly sensitive acoustic vibration sensor based on a tapered-tip optical fiber acting as a microcantilever. The tapered-tip fiber has a unique output profile that exhibits a circular fringe pattern, whose distribution is highly sensitive to the vibration of the fiber tip. A piezo transducer is used for the acoustic excitation of the fiber microcantilever, which results in a periodic bending of the tip and thereby a significant output power modulation.
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