Very small IF resonator filters using reflection of shear horizontal wave at free edges of substrate.

IEEE Trans Ultrason Ferroelectr Freq Control

Murata MFG. Co., Ltd., Nagaokakyo, Kyoto, Japan.

Published: September 2002

A shear horizontal (SH) wave has the characteristic of complete reflection at the free edges of a substrate with a large dielectric constant. A conventional surface acoustic wave (SAW) resonator filter requires reflectors consisting of numerous grating fingers on both sides of interdigital transducers (IDTs). On the contrary, it is considered that small-sized and low loss resonator filters without reflectors consisting of grating fingers can be realized by exploiting this characteristic of the SH wave or the Bleustein-Gulyaev-Shimizu (BGS) wave. There are two types of resonator filters: transversely coupled and longitudinally coupled. No transversely coupled filters (neither conventional nor edge-reflection) using the SH wave on a single-crystal substrate have been realized until now, because two transverse modes (symmetrical and asymmetrical modes) are not easily coupled. However, the authors have realized small low loss transversely coupled resonator filters in the range of 25 to 52 MHz using edge reflections of the BGS wave on piezoelectric ceramic (PZT: Pb(Zr,Ti)O3) substrates for the first time by developing methods by which the two transverse modes could be coupled. On the other hand, longitudinally coupled resonator filters using edge reflection of the SH or BGS wave always have large spurious responses because of the even modes in the out-of-band range, because the frequencies of even modes do not coincide with the nulls of the frequency spectra of the IDTs. Consequently, longitudinally coupled resonator filters using the edge reflection of the SH wave have not been realized. By developing a method of reducing the spurious responses without increasing of the insertion loss, the authors have realized small low loss longitudinally coupled resonator filters in the range of 40 to 190 MHz using edge reflection of BGS or SH waves on PZT or 36 degrees-rotated-Y X-propagation LiTaO3 substrates for the first time. Despite being intermediate frequency (IF) filters, their package (3 x 3 x 1.03 mm3) sizes are as small as those of radio frequency (RF) SAW filters.

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http://dx.doi.org/10.1109/tuffc.2002.1041544DOI Listing

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