This paper describes the first demonstration for feeding back the results obtained by the line-focus-beam ultrasonic material characterization (LFB-UMC) system to the crystal growth conditions for optical-grade LiTaO3 crystals and for achieving much improved homogeneity of chemical composition. We evaluated a commercially available optical-grade LiTaO3 single crystal with a nominally congruent composition in detail, by measuring distributions of the velocities of leaky surface acoustic waves (LSAW) along the Y-axis direction for a Z-cut specimen plate prepared from the crystal grown in the Y-axis direction. We detected an increment of 0.66 m/s in LSAW velocity along the pulling axis direction corresponding to 0.024 mol% in Li2O content, and the compositional gradient was +0.346 x 10(-3) (Li2O-mol%)/mm. By experimentally obtaining the starting material composition dependence of the gradients, we developed a method of estimating the proper composition ratio that would lead to a more homogeneous crystal. We grew a new crystal with a Li2O content of 48.47 mol%, resulting in a very small compositional gradient of +0.046 x 10(-3) (Li2O-mol%)/mm and a compositional homogeneity of less than 0.012 Li2O-mol% in a Z-cut area of 50 mm x 50 mm used for device substrates.
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http://dx.doi.org/10.1109/tuffc.2002.1020160 | DOI Listing |
IEEE Trans Ultrason Ferroelectr Freq Control
July 2002
Department of Electrical Engineering, Tohoku University, Sendai, Japan.
This paper describes the first demonstration for feeding back the results obtained by the line-focus-beam ultrasonic material characterization (LFB-UMC) system to the crystal growth conditions for optical-grade LiTaO3 crystals and for achieving much improved homogeneity of chemical composition. We evaluated a commercially available optical-grade LiTaO3 single crystal with a nominally congruent composition in detail, by measuring distributions of the velocities of leaky surface acoustic waves (LSAW) along the Y-axis direction for a Z-cut specimen plate prepared from the crystal grown in the Y-axis direction. We detected an increment of 0.
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