High-reflectivity HfO2/SiO2 ultraviolet mirrors.

Appl Opt

Institut Fresnel, Unité Mixte de Recherche, Centre National de la Recherche Scientifique, Ecole National Supérieure de Physique de Marseille, Domaine Universitaire de St Jérĵme, France.

Published: June 2002

High-reflectivity dense multilayer coatings were produced for the ultraviolet spectral region. Thin-film single layers and UV mirrors were deposited by ion plating and plasma ion-assisted deposition high-energetic technologies. Optical characterizations of HfO2 and SiO2 single layers are made. The optical constants obtained for these two materials are presented. HfO2 and SiO2 mirrors with a reflectance of approximately 99% near 250 nm are reported.

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Source
http://dx.doi.org/10.1364/ao.41.003256DOI Listing

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