Publications by authors named "Zuhal Tasdemir"
Article Synopsis
- Silicon nanowire sensors have gained popularity in micro- and nano-electromechanical systems due to their flexibility and strength at the nanoscale.
- This study is the first to utilize scanning X-ray diffraction microscopy to analyze the crystalline strain and tilt in silicon-based structures featuring pillars and suspended nanowires.
- Findings reveal that while lattice strain is minimal, significant lattice tilt exists, highlighting how fabrication processes like electron-beam lithography affect the crystal structure of these sensor materials.
Introducing a single silicon nanowire with a known orientation and dimensions to a specific layout location constitutes a major challenge. The challenge becomes even more formidable, if one chooses to realize the task in a monolithic fashion with an extreme topography, a characteristic of microsystems. The need for such a monolithic integration is fueled by the recent surge in the use of silicon nanowires as functional building blocks in various electromechanical and optoelectronic applications.
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