Optimization of Ag coated hydrogen silsesquioxane square array hybrid structure design for surface-enhanced Raman scattering substrate.

A computer-automated design process for a surface-enhanced Raman scattering (SERS) substrate using a particle swarm optimization algorithm is proposed. Nanostructured Ag coated hydrogen silsesquioxane nanopillar arrays of various sizes for SERS substrate applications are fabricated by direct Ag film deposition on substrates patterned by electron beam lithography and are investigated systematically. Good agreement is demonstrated between experimental and simulation results.