A Single-Clamp Inchworm Actuator with Two Piezoelectric Stacks.

Inchworm piezoelectric actuators have attracted much attention in the field of precision positioning due to the advantages of a large stroke, high output force, and high resolution. However, traditional inchworm piezoelectric actuators use two sets of clamps and a set of drive structures to achieve stepping motion, which generally requires at least three piezoelectric stacks, resulting in a complex structure and the control system. Several methodologies have been advanced to minimize the utilization of piezoelectric stacks.