Application of x-ray energy dispersive spectroscopy to analyzing the thickness of diamond-like carbon film deposited on the surface of microparticles.

Depositing diamond-like carbon (DLC) film is considered to be more promising for surface modification of microparticles. The development of reliable and precise measurement techniques for DLC coatings on microparticles is crucial for advancing research in this field. This paper introduces a methodological approach for quantifying the thickness of the film on microparticles.