[Structural and optical characterization of ZnO thin films grown by plasma-assisted molecular beam epitaxy].

High-quality ZnO thin films were grown by plasma-assisted molecular beam epitaxy (P-MBE) on Al2 O3 (0001) substrate with a low temperature ZnO buffer layer. Structural and optical characterization were studied for ZnO thin films. Only a peak at (0002) were observed in the X-ray reflectivity (XRD) spectra with the full-width at half maximum (FWHM) value 0.