Effects of additives on the selectivity of byproducts and dry removal of fluorine for abating tetrafluoromethane in a discharge reactor.

The removal efficiency of tetrafluoromethane (CF(4)) was significantly enhanced by adding additives (H(2), O(2), H(2)+O(2), H(2)O) in an atmospheric-pressure microwave plasma reactor. However, large amounts of fluorine (F(2)) were produced in this study. Moreover, the selectivity of F(2) was apparently greater than that of HF (in H(2)-based condition) or COF(2) (in O(2)-based abatement).