Readout circuit noise analysis and low-noise design for piezoelectric micro-machined ultrasonic transducers with large parasitic capacitance.

Readout circuits are fundamental components in many application systems that utilize piezoelectric micro-machined ultrasonic transducers (pMUTs). This study models the noise and signal transfer functions of trans-impedance amplifiers (TIAs), charge-sensitive circuits, and voltage-mode readout circuits in detail. A series of simulations and experiments were conducted to elucidate the advantages and disadvantages of these circuit types.

Total-Focus Ultrasonic Imaging of Defects in Solids Using a PZT Piezoelectric Micromachined Ultrasonic Transducer Array.

This work demonstrates the ultrasonic imaging ability of piezoelectric micromachined ultrasonic transducer (PMUT) for the detection of defects deep in solids by total-focus imaging algorithm. The 3-MHz PMUT array uses thin-film PZT as the material for energy transformation because of its high piezoelectric coefficient. Six columns with 12 PMUT units each exhibit an acoustic pressure of 137 kPa measured in water at 1 cm away when driven by a 27-Vpp input.

Design, Characterization, and Analysis of PZT Micromachined Piezoelectric Ultrasonic Transducers With Good Coupling to Solids.

This article presents the piezoelectric micromachined ultrasonic transducer (PMUT) and its arrays that were based on a sputtered PZT/Si diaphragm structure and prototyped from an SOI substrate. Due to the high piezoelectric coefficient of PZT, polarization tuning pretreatment, and membrane thickness optimization, the PMUT shows high transmitting sensitivity in air and good coupling capability to liquid and solid. The PMUT transmitter exhibited a high sensitivity of 809, 190, and 135 nm/V at a resonant frequency of 0.