A Highly Accurate Method for Measuring Response Time of MEMS Thermopiles.

The response time is an important parameter for thermopiles sensors, which reflects the response speed of the device. The accurate measurement of response time is extremely important to evaluate device characteristics for using them in suitable scenarios. In this work, to accurately measure the response time of thermopile sensors, an Al microheater is integrated in a MEMS thermopile as an in situ heat source.