Full area covered 3D profile measurement of special-shaped optics based on a new prototype non-contact profiler.

A new prototype non-contact profiler based on surface tracking has been specially developed. Surface tracking is carried out by a specially designed dual stage probe system with the aid of a four-Degree Of Freedom high-precision motion platform. The dual stage probe system keeps a short-range optical probe constantly tracking the surface by a self-developed voice coil motor servo, by which a wide measuring range of up to 10 mm is realized.