Dispersion of Heat Flux Sensors Manufactured in Silicon Technology.

In this paper, we focus on the dispersion performances related to the manufacturing process of heat flux sensors realized in CMOS (Complementary metal oxide semi-conductor) compatible 3-in technology. In particular, we have studied the performance dispersion of our sensors and linked these to the physical characteristics of dispersion of the materials used. This information is mandatory to ensure low-cost manufacturing and especially to reduce production rejects during the fabrication process.

Simultaneous fabrication of superhydrophobic and superhydrophilic polyimide surfaces with low hysteresis.

Polyimide is of great interest in the field of MEMS and microtechnology. It is often used for its chemical, thermal, mechanical, and optical properties. In this paper, an original study is performed on controlled variation of polyimide film wettability.