Compact Modeling of Advanced Gate-All-Around Nanosheet FETs Using Artificial Neural Network.

As the architecture of logic devices is evolving towards gate-all-around (GAA) structure, research efforts on advanced transistors are increasingly desired. In order to rapidly perform accurate compact modeling for these ultra-scaled transistors with the capability to cover dimensional variations, neural networks are considered. In this paper, a compact model generation methodology based on artificial neural network (ANN) is developed for GAA nanosheet FETs (NSFETs) at advanced technology nodes.