AFM nanolithography on a mixed LB film of hexadecylamine and palmitic acid.

An evenly mixed Langmuir film of hexadecylamine (HDA) and palmitic acid (PA) was prepared on the air-water interface and transferred to a Si substrate for the fabrication of nano-sized patterns. Vibrational spectrum of the transferred film shows that all acid groups of PAs were deprotonated and amine groups of HDAs were protonated by an acid-base reaction. The effect of mixing ratios in atomic force microscopy anodization lithography on the mixed films was investigated in terms of the line width of the protruded pattern.