Fabrication of Fe-based metal glass microelectrodes by a vertical liquid membrane electrochemical etching method.

The excellent physical and chemical properties of metallic glasses and the absence of crystal defects make them ideal materials for the preparation of microelectrodes. A vertical liquid membrane electrochemical etching method is proposed here for the fabrication of microelectrodes from the Fe-based metallic glass FeBSi. With this method, insoluble electrolysis products are kept away from the processing area, and the nonuniformity of the diffusion layer that occurs in traditional transverse liquid membrane electrochemical etching is reduced.