Quality factor control of mechanical resonators using variable phononic bandgap on periodic microstructures.

The quality factor (Q-factor) is an important parameter for mechanical resonant sensors, and the optimal values depend on its application. Therefore, Q-factor control is essential for microelectromechanical systems (MEMS). Conventional methods have some restrictions, such as additional and complicated equipment or nanoscale dimensions; thus, structural methods are one of the reasonable solutions for simplifying the system.