Alignment-Free Sensing Module for Absolute and Incremental Lines in Linear Positioning System Based on Tunneling-Magnetoresistance Sensors.

An alignment-free sensing module for the positioning system based on tunneling magnetoresistive (TMR) sensors with an absolute-incremental-integrated scale is demonstrated. The sensors of the proposed system for both lines consist of identical layer stacks; therefore, all sensors can be fabricated in identical processes from thin film deposition to device patterning on a single substrate. Consequently, the relative position of the sensors can be predefined at the lithography stage and the alignment error between sensors caused by the manual installation is completely eliminated.