We fabricated a rigid bandpass filter with a broad far-infrared wavelength range of high transmission using a silicon subwavelength structure with a Babinet complementary metamaterial half-mirror pair, despite its apparent light-blocking structure. The rigid one-piece filter was produced by a simple process involving photolithography, dry etching, and deposition, each performed only once. The transmission principle relies on the Fabry-Perot resonance with a metamaterial half-mirror pair that exhibits extraordinary optical transmission due to spoof surface plasmon polaritons.
View Article and Find Full Text PDFWe developed broadband antireflection structures for millimeter-wave and submillimeter-wave applications, particularly cryogenic applications. The structures were fabricated on silicon using deep reactive ion etching. Three-layer subwavelength structures were fabricated on both sides of a silicon plate with an area of 20.
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