Fabrication of a novel microsensor consisting of electrodeposited ZnO nanorod-coated crossed Cu micropillars and the effects of nanorod coating morphology on the gas sensing.

A novel microsensor, consisting of crossed Cu micropillars coated with ZnO nanorods, was fabricated by electrochemical methods for detecting gas in a small space. The Cu micropillars (80 μm diameter, 10 mm long) were prepared by microanode-guided electroplating (MAGE) on the periphery of a square copper pad (dimensions 5.0 mm × 5.