Remote Plasma-Induced Synthesis of Self-Assembled MoS/Carbon Nanowall Nanocomposites and Their Application as High-Performance Active Materials for Supercapacitors.

The objective of this study is to investigate the synthesis and influence of MoS on carbon nanowalls (CNWs) as supercapacitor electrodes. The synthesis of MoS on CNW was achieved by the introduction of hydrogen remote plasma from ammonium tetrathiomolybdate (ATTM) without deterioration of the CNWs. The topographical surface structures and electrochemical characteristics of the MoS-CNW composite electrodes were explored using two ATTM-dispersed organic solvents-acetonitrile and dimethylformamide (DMF).

Anti-contamination SMART (Spectrum Monitoring Apparatus with Roll-to-roll Transparent film) window for optical diagnostics of plasma systems.

Optical emission spectroscopy is widely used in semiconductor and display manufacturing for plasma process monitoring. However, because of the contamination of the viewport, quantitative analysis is extremely difficult; therefore, qualitative analysis is used to detect species in the process. To extend plasma monitoring in advanced precise processes, the contamination problem of the viewport must be solved.

Development of plasma assisted thermal vapor deposition technique for high-quality thin film.

The novel technique of Plasma-Assisted Vapor Deposition (PAVD) is developed as a new deposition method for thin metal films. The PAVD technique yields a high-quality thin film without any heating of the substrate because evaporated particles acquire energy from plasma that is confined to the inside of the evaporation source. Experiments of silver thin film deposition have been carried out in conditions of pressure lower than 10 Pa.