Publications by authors named "Yoichiro Nakanishi"
Article Synopsis
- This study investigates how the acceleration voltage affects the spatial resolution of an electron-beam assisted optical microscope (EXA).
- Using red-emitting cathodoluminescence from a YO:Eu thin film, higher voltages resulted in better spatial resolution, achieving around 90 nm resolution at voltages above 20 kV.
- The findings are explained through simulations that analyze electron scattering trajectories in the luminescent thin film, highlighting the connection between voltage and image quality.
We fabricated a bright and thin Zn₂SiO₄ luminescent film to serve as a nanometric light source for high-spatial-resolution optical microscopy based on electron beam excitation. The Zn₂SiO₄ luminescent thin film was fabricated by annealing a ZnO film on a Si₃N₄ substrate at 1000 °C in N₂. The annealed film emitted bright cathodoluminescence compared with the as-deposited film.
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