A method for measuring the relative phases (RPs) among the three beams in the case of homodyne three-beam interference (TBI) is proposed and verified by the ZEMAX simulation in this paper. The method requires that the interference beams are not on the same plane, that is, any two of the three beams interfere at an angle in different planes. Based on the phase delay of the beam in space, the inclined beams have different phases at different positions within the beams' range.
View Article and Find Full Text PDFIn this paper, the errors of the displacement measurement interferometer with multi-mode fiber-coupled delivery are analyzed when the fibers are disturbed. Simulation results show that the characteristic frequency of the measurement error is consistent with that of disturbance, and the error has higher order frequency components. The experiments are designed for the effect of fringe contrast on the measurement error.
View Article and Find Full Text PDFIn the displacement measurement of the wafer stage in lithography machines, signal quality is affected by the relative angular position between the encoder head and the grating. In this study, a two-degree-of-freedom fiber-coupled heterodyne grating interferometer with large operating range of rotation is presented. Fibers without fiber couplers are utilized to receive the interference beams for high-contrast signals under the circumstances of large angular displacement and ZEMAX ray tracing software simulation and experimental validation have been carried out.
View Article and Find Full Text PDFObjective: To develop and validate a nutrition screening tool that is effective to recognize renal inpatients at risk of undernutrition.
Design: A prospective, criterion validation.
Subjects: Adults admitted to a hospital ward with acute kidney injury, chronic kidney disease, and dialysis regardless of gender or ethnicity (n = 122) were recruited.