Micromachines (Basel)
July 2021
To analyze the distortion problem of two-dimensional micro-electromechanical system (MEMS) micromirror in-plane scanning, this paper makes a full theoretical analysis of the distortion causes from many aspects. Firstly, the mathematical relations among the deflection angle, laser incidence angle, and plane scanning distance of the micromirror are constructed, and the types of projection distortion of the micromirror scanning are discussed. Then the simulation results of reflection angle distribution and point cloud distribution are verified by MATLAB software under different working conditions.
View Article and Find Full Text PDFAn automatic, miniature and multi-parameter on-line water quality monitoring system based on a micro-spectrometer is designed and implemented. The system is integrated with the flow-batch analysis and spectrophotometric detection method. The effectiveness of the system is tested by measuring chemical oxygen demand (COD) and ammonia-nitrogen in water.
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