Polynomial fitting method of background correction for electron backscatter diffraction patterns.

A raw electron backscatter diffraction (EBSD) signal can be empirically decomposed into a Kikuchi diffraction pattern and a smooth background. For pattern indexing, the latter is generally undesirable but can reveal topographical, compositional, or diffraction contrast. In this study, we proposed a new background correction method using polynomial fitting (PF) algorithm to obtain clear Kikuchi diffraction patterns for some applications in nonconductive materials due to coating problems, at low accelerated voltage and at rough sample surfaces and for the requirement of high pattern quality in HR-EBSD.