Boron nitride (BN) is a promising semiconductor with a wide band gap ( approximately 6 eV). Here, we report the synthesis of vertically aligned BN nanosheets (BNNSs) on silicon substrates by microwave plasma chemical vapor deposition from a gas mixture of BF(3)-N(2)-H(2). The size, shape, thickness, density, and alignment of the BNNSs were well-controlled by appropriately changing the growth conditions.
View Article and Find Full Text PDFThe growth of cubic boron nitride (cBN) films on bare silicon and amorphous tetrahedral carbon (ta-C) layers prepared on silicon substrates was studied. The cBN films were prepared by radio frequency magnetron sputter deposition at approximately 870 degrees C. The original ta-C interlayers were graphitized and restructured under high temperature and possibly under ion bombardment during BN deposition.
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