A simple bidirectional linear microactuator for nanopositioning--the "Baltan" microactuator.

A new linear microactuator, using bulk PZT and electro-discharge-machined components, generates a sliding velocity and force of 100 mm/s and 12 mN, respectively, in either direction, and a peak velocity and force of 212 mm/s and 44 mN, respectively. Using a simple combination of two slightly different beams placed in contact with a slider, and vibrated at two different resonance frequencies, 508 and 522 kHz, by a specially designed, axially vibrating piezoelectric element, bidirectional linear motion was obtained. By simply reducing the length of the applied signal, the sliding distance was reduced to 90 nm +/- 2 nm, which could be improved with a variety of control methods.

A miniaturization of the multi-degree-of-freedom ultrasonic actuator using a small cylinder fixed on a substrate.

Multi-degree-of-freedom ultrasonic actuator has been studied for robot arms and multidimensional precision table and so on because of its simple structure, silent operation, and holding force. In this study, we aim to miniaturize multi-degree-of-freedom ultrasonic actuator for fabrication on a substrate. This actuator consists of a stainless steel cylinder and a PZT ring.