Slope-temperature faceting diagram for macrosteps at equilibrium.

Faceting diagrams between surface slope and temperature are calculated numerically based on statistical mechanics for inclined surfaces between (001) and (111) surfaces at equilibrium. A lattice model is employed that includes point-contact-type step-step attractions from the quantum mechanical couplings between neighbouring steps. Comparing the obtained faceting diagrams with the phase diagram for step bunching proposed by Song and Mochrie for Si(113), the effective step-step attraction energy for Si(113) is approximately estimated to be 123 meV.