Chemical solution growth of ferroelectric oxide thin films and nanostructures.

Chemical solution deposition (CSD) provides a low-cost, versatile approach for processing of thin and ultrathin ferroelectric films, as well as short and high aspect ratio ferroelectric nanostructures. This review discusses the state of the art in the processing of ferroelectric oxide thin films and nanostructures by CSD, with special emphasis on nucleation and growth phenomena. The effects of choice of precursor solution, substrate and bottom electrode stack, and thermal treatment conditions on the nucleation and growth are examined.

Direct fabrication of arbitrary-shaped ferroelectric nanostructures on plastic, glass, and silicon substrates.

A complementary metal-oxide-semico-nductor (CMOS)-compatible method for the direct fabrication of arbitrary-shaped Pb(Zr0.52 Ti0.48)O3 and PbTiO3 ferroelectric/piezoelectric nanostructures on plastic, silicon, and soda-lime glass substrates is reported.