This paper presents a Piezoelectric micromechanical ultrasonic transducer (PMUT) based on a Pt/ScAlN/Mo/SiO/Si/SiO/Si multilayer structure with a circular suspension film of scandium doped aluminum nitride (ScAlN). Multiphysics modeling using the finite element method and analysis of the effect of different Sc doping concentrations on the resonant frequency, the effective electromechanical coupling coefficient (keff2) and the station sensitivity of the PMUT cell are performed. The calculation results show that the resonant frequency of the ScAlN-based PMUT can be above 20 MHz and its keff2 monotonically rise with the increasing doping concentrations in ScAlN.
View Article and Find Full Text PDFIn this work, we systematically studied the deposition, characterization, and crystal structure modeling of ScAlN thin film. Measurements of the piezoelectric device's relevant material properties, such as crystal structure, crystallographic orientation, and piezoelectric response, were performed to characterize the ScAlN thin film grown using pulsed DC magnetron sputtering. Crystal structure modeling of the ScAlN thin film is proposed and validated, and the structure-property relations are discussed.
View Article and Find Full Text PDFSpectrochim Acta A Mol Biomol Spectrosc
February 2022
A novel Au NPs/GeO nanozymes are developed as Surface-Enhanced Raman Scattering (SERS) substrates with the promising prospect for detection ChI. Herein, it is discovered that both Au NPs and GeO nanozymes have peroxidase-like activity, catalyzing colorless 3,3',5,5'-tetramethylbenzidine (TMB) to produce blue TMB. Interestingly, compared with single Au NPs or GeO nanozymes, the Au NPs/GeO nanozymes show stronger peroxidase-like activity, and significantly ameliorated SERS signal of TMB.
View Article and Find Full Text PDFAlthough excellent dielectric, piezoelectric, and pyroelectric properties matched with or even surpassing those of ferroelectric ceramics have been recently discovered in molecular ferroelectrics, their successful applications in devices are scarce. The fracture proneness of molecular ferroelectrics under mechanical loading precludes their applications as flexible sensors in bulk crystalline form. Here, self-powered flexible mechanical sensors prepared from the facile deposition of molecular ferroelectric [C(NH ) ]ClO onto a porous polyurethane (PU) matrix are reported.
View Article and Find Full Text PDFIn this work, an electric field-induced giant strain response and excellent photoluminescence-enhancement effect was obtained in a rare-earth ion modified lead-free piezoelectric system. Pr(3+)-modified 0.93(Bi0.
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