Helical hollow channel waveguide in YAG fabricated by femtosecond laser enhanced wet etching.

Three-dimensional optical waveguides with hollow channels have many advantages, such as strong mode confinement and excellent dispersion control ability. Femtosecond laser enhanced wet etching is widely used to fabricate hollow channel waveguides in transparent dielectric materials. We propose a method for fabricating hollow channel waveguides in YAG using femtosecond laser enhanced wet etching with a simpler fabrication process and shorter etching time compared with the previous work.