A hard mask process and alignment device aims to achieve high consistency and mass-scale production of gas sensors based on spraying hydrothermal gas sensing material.

The material synthesized through the hydrothermal method has received extensive and in-depth study in recent years, with a large number of literature reporting their excellent performance in the fields of catalysis or gas sensitivity. In order to combine the hydrothermal material with micro-electro-mechanical system processes to achieve large-scale manufacturing of hydrothermal synthesized materials at the wafer-level, this paper proposes a series of processes for hard mask patterned electro-atomization spraying of hydrothermal materials and designs and manufactures an alignment device that achieves the alignment of silicon hard mask and electrode wafers based on the vacuum clamping principle. Through experiments, it has been verified that this device can achieve micrometer-level alignment between the hard mask and the electrode wafer.

TiOhierarchical nano blooming-flower decorated by Pt for formaldehyde detection.

To achieve an ultra-low concentration formaldehyde detection at low temperature, a platinum (Pt) assisted TiOhierarchical nano blooming-flower sphere material is synthesized through hydrothermal method. SEM and transmission electron microscope characterizations show that the diameter of the nano sphere was around 2m with dissilient rods of 60 nm in diameter and 1m in length on the surface. The response (/) achieved form this nanomaterial to HCHO is 1.

The role of the hybridization between Mn 3d and O 2p orbitals in the existence of the Griffiths phase in La0.85Ca0.15MnO3.

Favourable conditions for the existence of the Griffiths phase in the La0.85Ca0.15MnO3 compound are experimentally investigated in terms of electronic and lattice structure by temperature-dependent x-ray absorption spectroscopy, valence band photoemission spectroscopy, and x-ray diffraction experiments.