A GHz Silicon-Based Width Extensional Mode MEMS Resonator with over 10,000.

This work presents a silicon-based capacitively transduced width extensional mode (WEM) MEMS rectangular plate resonator with quality factor () of over 10,000 at a frequency of greater than 1 GHz. The value, determined by various loss mechanisms, was analyzed and quantified via numerical calculation and simulation. The energy loss of high order WEMs is dominated by anchor loss and phonon-phonon interaction dissipation (PPID).