A Dynamic Hysteresis Model and Nonlinear Control System for a Structure-Integrated Piezoelectric Sensor-Actuator.

The piezoelectric sensor-actuator plays an important role in micro high-precision dynamic systems such as medical robots and micro grippers. These mechanisms need high-precision position control, while the size of the sensor and actuator should be as small as possible. For this paper, we designed and manufactured a structure-integrated piezoelectric sensor-actuator and proposed its PID (Proportion Integral Differential) control system based on the dynamic hysteresis nonlinear model and the inverse model.