Microscale Humidity Sensor Based on Iron-Coated Elaters of Spores.

Humidity sensors deeply influence human manufacturing production and daily life, while researchers generally focus on developing humidity sensors with higher stability, higher linearity, rapid response time, etc. Yet, few people discuss measuring humidity in the microenvironment by miniaturizing sensor size into a microscale, in which the existing humidity sensors are difficult to reach. Accordingly, this study proposes a methodology for measuring relative humidity in the microscale by utilizing the distinctive morphologies of spores across a range of relative humidities between 50% and 90%.