Suppression Method of Optical Noises in Resonator-Integrated Optic Gyroscopes.

Resonator-integrated optical gyroscopes have advantages such as all-solid-state, on-chip integration, miniaturized structure, and high precision. However, many factors deteriorate the performance and push it far from the shot-noise limited theoretical sensitivity. This paper reviews the mechanisms of various noises and their corresponding suppression methods in resonator-integrated optical gyroscopes, including the backscattering, the back-reflection, the polarization error, the Kerr effect, and the laser frequency noise.

Optimization and Fabrication of MEMS suspended structures for nanoscale thermoelectric devices.

By eliminating the influence of the substrate on parasitic thermal resistance, MEMS suspended structures become one of the accurate nanoscale thermoelectric performance evaluation devices. However, the process of MEMS suspended thermoelectric devices is complex, and its multilayer suspended structure is easy to fracture due to large stress. As a result, optimizing the design of suspended structures is critical in order to reduce manufacturing complexity and increase yield.

The Recent Progress of MEMS/NEMS Resonators.

MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clamped resonators, and their applications in mass sensing, micromechanical thermal analysis, quantum detection, and oscillators are introduced in detail.

Heterogeneous integration of InP and SiN waveguides based on interlayer coupling for an integrated optical gyroscope.

In this study, we demonstrate a novel, to the best of our knowledge, integrated indium phosphide (InP) and silicon nitride () waveguide platform, which is based on interlayer coupling, to achieve heterogeneous integration of a photodetector and waveguide ring resonator firstly. In order to improve the gyro bias stability, the and InP waveguides were designed with a high polarization extinction ratio and ultra-low loss. Three-dimensional finite difference time domain methods are used to optimize the InP taper dimensions to provide efficient optical coupling between the and InP waveguides.