Digital inverse patterning solutions for fabrication of high-fidelity microstructures in spatial light modulator (SLM)-based projection lithography.

Digital mask projection lithography (DMPL) technology is gaining significant attention due to its characteristics of free-mask, flexibility, and low cost. However, when dealing with target layouts featuring sizes smaller than the wavelength scale, accurately producing resist patterns that closely match the target layout using conventional methods to design the modulation coefficients of digital masks produced by spatial light modulators (SLM) becomes challenging. Here, we present digital inversion lithography technology (DILT), which offers what we believe to be a novel approach to reverse engineer the modulation coefficients of digital masks.

Optical proximity correction of hot-spot patterns with subwavelength size in DMD maskless projection lithography.

When the critical dimension (CD) of resist patterns nears the resolution limit of the digital micromirror device (DMD) maskless projection lithography (DMD-MPL), significant distortion can emerge in the silicon wafer due to the optical proximity effect (OPE). The significant distortion (breakpoints, line-end scaling, corner rounding, etc.) between resist patterns and target patterns results in reduced lithographic quality.

Generating an M × N spot array with a dual-period hybrid Dammann grating fabricated using maskless projection lithography.

The Dammann grating (DG), which redistributes a collimated laser beam into a spot array with a uniform intensity, is a widely adopted approach for profile measurement. Conventional DGs for dense spot projection are binary phase gratings with precisely designed groove structures, which suffer from low efficiency, poor uniformity, and a hard-to-fabricate fine feature size when utilized for a large field of view (FOV). Here, we propose a new, to the best of our knowledge, hybrid DG architecture consisting of two different grating periods which effectively generates an engineering M × N spot array with a non-complex structural design.

Label-free neural networks-based inverse lithography technology.

Neural network-based inverse lithography technology (NNILT) has been used to improve the computational efficiency of large-scale mask optimization for advanced photolithography. NNILT is now mostly based on labels, and its performance is affected by the quality of labels. It is difficult for NNILT to achieve high performance and extrapolation ability for mask optimization without using labels.

Consistent pattern printing of the gap structure in femtosecond laser DMD projection lithography.

Maskless lithography technologies have been developed and played an important role in the fabrication of functional micronano devices for microelectronics, biochips and photonics. Optical projection lithography based on digital micromirror device (DMD) is an efficient maskless lithography technology that can rapidly fabricate complex structures. The precise modulation of gap width by DMD maskless optical projection lithography (MOPL) using femtosecond laser becomes important for achieving micronano structures.

λ/30 inorganic features achieved by multi-photon 3D lithography.

It's critically important to construct arbitrary inorganic features with high resolution. As an inorganic photoresist, hydrogen silsesquioxane (HSQ) has been patterned by irradiation sources with short wavelength, such as EUV and electron beam. However, the fabrication of three- dimensional nanoscale HSQ features utilizing infrared light sources is still challenging.

Maximizing energy utilization in DMD-based projection lithography.

In digital micromirror device (DMD)-based projection photolithography, the throughput largely depends on the effectiveness of the laser energy utilization, which is directly correlated to the diffraction efficiency of DMD. Here, to optimize the DMD diffraction efficiency and thus the laser energy utilization, we calculate the diffraction efficiencies E of DMD with various pitch sizes at wavelengths ranging from 200 nm to 800 nm, using the two-dimensional blazed grating diffraction theory. Specifically, the light incident angle is optimized for 343 nm laser and 7.

Efficient 4.95 µm-8.5 µm dual-band grating coupler with crosstalk suppression capability.

In many integrated optics systems, grating couplers are a key component of interfacing the external light source with in-plane photonic devices. Grating couplers with dual-band capability are often desired for expanding the operation spectrum of photonic systems. Here, we propose and theoretically investigate, for the first time, a 4.

Femtosecond laser trapping nanoprinting of silver micro/nanostructures.

In this paper, silver micro/nanostructures composed of sintered nanoparticles were printed by capturing silver nanoparticles in water with 800 nm femtosecond laser trapping. Relationships of laser power, scanning speed, nanoparticle concentration, and the width and morphology of fabricated silver wire were systematically investigated. It is found that low scanning speed and high nanoparticle concentration favor the printing of silver wire with good morphology.

λ/12 Super Resolution Achieved in Maskless Optical Projection Nanolithography for Efficient Cross-Scale Patterning.

The emerging demand for device miniaturization and integration prompts the patterning technique of micronano-cross-scale structures as an urgent desire. Lithography, as a sufficient patterning technique, has been playing an important role in achieving functional micronanoscale structures for decades. As a promising alternative, we have proposed and demonstrated the maskless optical projection nanolithography (MLOP-NL) technique for efficient cross-scale patterning.

Biocompatible Three-Dimensional Hydrogel Cell Scaffold Fabricated by Sodium Hyaluronate and Chitosan Assisted Two-Photon Polymerization.

The biocompatibility of the three-dimensional (3D) hydrogel cell scaffolds that sodium hyaluronate (SH) and carboxymethyl chitosan (Chitosan) has been investigated. The minimum processing threshold of 2.94 mW and the feature line width of 80 nm have been obtained by the two-photon polymerization (TPP) technology using the as-prepared biocompatible photoresist.

Cell Behavior on 3D Ti-6Al-4 V Scaffolds with Different Porosities.

Porous titanium (Ti) and its alloys fabricated by additive manufacturing (AM) techniques have attractive potential for dental and bone defect repair fields. Understanding the relationship between cells and the surface of the as-built three-dimensional (3D) scaffold interactions is not only necessary for tissue engineering but also promising for improving the fabrication process in the manufacture of artificial implants by AM technology. In this study, we have aimed to investigate the cell behavior including adhesion and proliferation of fibroblasts (L929) on Ti-6Al-4 V scaffolds fabricated by the electron beam melting method.

Cucurbit[7]uril-Carbazole Two-Photon Photoinitiators for the Fabrication of Biocompatible Three-Dimensional Hydrogel Scaffolds by Laser Direct Writing in Aqueous Solutions.

We have introduced a novel water-soluble two-photon photoinitiator based on the host-guest interaction between 3,6-bis[2-(1-methyl-pyridinium)vinyl]-9-pentyl-carbazole diiodide (BMVPC) and cucurbit[7]uril (CB7) because most of the commercial photoinitiators have poor two-photon initiating efficiency in aqueous solutions. The binding ratio of BMVPC and CB7 was determined as 1:1 by isothermal titration calorimetry and quantum chemical calculation. The formation of the host-guest complex increases the two-photon absorption cross-section about five times, and improves the water solubility required as the photoinitiator for hydrogel fabrication.

Laser-Induced Antibacterial Activity of Novel Symmetric Carbazole-Based Ethynylpyridine Photosensitizers.

In this study, two kinds of novel carbazole-based ethynylpyridine salts: 3,6-bis[2-(1-methylpyridinium)ethynyl]-9-pentyl-carbazole diiodide (BMEPC) and 3,6-bis[2-(1-methylpyridinium)ethynyl]-9-methyl-carbazole diiodide (BMEMC) have been employed as photosensitizers owing to their excellent antibacterial activity. These molecules possess symmetric A-π-D-π-A-type structures, which would bring in the unique optical properties. The inhibition zone measurement of a gradient concentration from 0 to 100 μM showed BMEPC and BMEMC photoinduced antibacterial activity against .

The Conductive Silver Nanowires Fabricated by Two-beam Laser Direct Writing on the Flexible Sheet.

Flexible electrically conductive nanowires are now a key component in the fields of flexible devices. The achievement of metal nanowire with good flexibility, conductivity, compact and smooth morphology is recognized as one critical milestone for the flexible devices. In this study, a two-beam laser direct writing system is designed to fabricate AgNW on PET sheet.

Carboxylated Nanodiamond: Aggregation Properties in Aqueous Dispersion System and Application in Living Cell Fluorescence Imaging.

Nanodiamond, which has a lattice defect, the energy band gap and good biocompatibility, is an ideal inorganic fluorescent imaging material for cells. However, the nanodiamond aggregation is not exactly suitable for cells' endocytosis if the size is too small or too big. Therefore, it has a profound meaning to modify the surface of nanodiamond and control the dispersion of nanodiamond aggregate.

Transition of lasing modes in polymeric opal photonic crystal resonating cavity.

We demonstrate the transition of lasing modes in the resonating cavity constructed by polystyrene opal photonic crystals and 7 wt. % tert-butyl Rhodamine B doped polymer film. Both single mode and multiple mode lasing emission are observed from the resonating cavity.

Low threshold photonic crystal laser based on a Rhodamine dye doped high gain polymer.

We demonstrate low threshold lasing oscillation in a photonic crystal (PhC) laser by using tert-butyl Rhodamine B (t-Bu-RhB) doped gain media. Lactonic t-Bu-RhB is synthesized to improve doping concentration in polymethylmethacrylate (PMMA) films, and then isomerized to the zwitterion form to achieve highly fluorescent gain medium. The t-Bu-RhB doped PMMA film is sandwiched by a pair of polystyrene colloidal crystals to construct a PhC resonating cavity.

Steering electromagnetic beams with conical curvature singularities.

We describe how the transformation-optics technique can be used to design an effective medium mimicking the conical curvature singularity. Anholonomic coordinate transformation gives rise to linear topological defects that break the rotational symmetry. The bending and splitting of the optical beams are found analytically and numerically, depending on the incident direction and the topological charge.

A Novel Bio-carrier Fabricated Using 3D Printing Technique for Wastewater Treatment.

The structure of bio-carriers is one of the key operational characteristics of a biofilm reactor. The goal of this study is to develop a series of novel fullerene-type bio-carriers using the three-dimensional printing (3DP) technique. 3DP can fabricate bio-carriers with more specialized structures compared with traditional fabrication processes.

Two-photon polymerization microfabrication of hydrogels: an advanced 3D printing technology for tissue engineering and drug delivery.

3D printing technology has attracted much attention due to its high potential in scientific and industrial applications. As an outstanding 3D printing technology, two-photon polymerization (TPP) microfabrication has been applied in the fields of micro/nanophotonics, micro-electromechanical systems, microfluidics, biomedical implants and microdevices. In particular, TPP microfabrication is very useful in tissue engineering and drug delivery due to its powerful fabrication capability for precise microstructures with high spatial resolution on both the microscopic and the nanometric scale.

Biscarbazolylmethane-based cyanine: a two-photon excited fluorescent probe for DNA and selective cell imaging.

Here, we have introduced a novel biscarbazolylmethane-based cyanine as a two-photon excited fluorescent probe, 6,6'-bis[2-(1-methylpyridinium)vinyl]-bis(9-methyl-carbazol-3-yl)methane diiodide, which has two vinylpyridinium carbazole moieties connected by a non-rigid methylene bridge. This molecule possesses a larger Stokes shift and enhanced two-photon absorption cross-section than the previously reported vinylpyridinium carbazole monocyanine, which is mainly attributed to the "through-space" type intramolecular charge transfer. The low fluorescence quantum yield and 30-fold fluorescence enhancement once binding with calf thymus DNA highlight this molecule as a promising fluorescence light-up probe for DNA.

Two-photon induced photopolymerization using photoinitiator with an intramolecular radical quenching moiety for nanolithography.

We have investigated the photoinitiating properties of the photoinitiator 3,6-bis[2-(4-nitrophenyl)-ethynyl]-9-(4-methoxy-benzyl)-carbazole (BNMBC), which has an intramolecular radical quenching group "p-methoxybenzyl," in the substrate lines fabrication of two-photon induced photopolymerization (TPIP). Another photoinitiator 3,6-bis[2-(4-nitrophenyl)-ethynyl]-9-benzyl-carbazole (BNBC) with similar chemical structure but not radical quenching group was studied for comparison. Their photopolymerization properties were studied with resins in which BNBC and BNMBC were used as photoinitiators with a molar ratio of 0.

C2v symmetrical two-photon polymerization initiators with anthracene core: synthesis, optical and initiating properties.

A series of C(2v) symmetrical two-photon absorption compounds with anthracene core, 2,7-bis[2-(4-substituted phenyl)-vinyl]-9,10-dipentyloxyanthracenes designated as I, II and III (the substituted groups at the 4-position of phenyl of I, II and III were dimethylamino, methyl and cyano, respectively) were designed and synthesized as initiators in two-photon induced polymerization (TPIP). The anthracene ring was modified by linking vinylphenyl groups to the 2,7-position to extend conjugation system length and two pentyloxy groups to the 9,10-position to serve as electronic donors. Two-photon absorption cross section of I was around 300 GM, which was much larger than the 10 GM of II and 29 GM of III at 800 nm.

Hierarchical CdSe-gold hybrid nanocrystals: synthesis and optical properties.

The synthesis of hybrid nanostructures with controlled size, shape, composition and morphology has attracted increasing attention due to the fundamental and applicable interest. Here, we demonstrate the synthesis and optical properties of hierarchical CdSe-Au hybrid nanostructures with zinc blende (ZB) CdSe nanocrystals (NCs). For 3.