Publications by authors named "Xinhui Qin"
Materials (Basel)
August 2023
Article Synopsis
- * This study fabricates Zr:HfO thin films through RF magnetron sputtering and evaluates how different oxygen flow rates affect oxygen vacancies and overall electrical characteristics.
- * The results show that optimizing the oxygen flow to 40 sccm leads to enhanced ferroelectric properties, achieving a remnant polarization of 18 μC/cm and significantly reduced leakage current density.
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