Publications by Xiezheng Yu

Publications by authors named "Xiezheng Yu"

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Wet Anisotropic Etching Characteristics of Si{111} in KOH-Based Solution.

Xiezheng Yu Yinghua Ye Peng Zhu Lizhi Wu Ruiqi Shen

ACS Omega

January 2025

Wet chemical etching of silicon has been a topic of significant interest due to its importance in microelectromechanical systems (MEMS), nanotechnology, and semiconductor device fabrication. Many kinds of MEMS components (e.g.

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