To improve the photocatalytic property of TiO thin films, the composite thin films of TiO/NdO structure were fabricated by electron-beam physical vapor deposition method, and the photocatalytic property of the fabricated films was experimentally studied in the present work. The XRD and Raman analyses show that the TiO/NdO films are mainly hexagonal crystalline phase of NdO. The XPS analysis for the chemical state changes of Ti, O and Nd of the basic elements in the films is confirming the electron flow in the internal electric field which generated in the TiO/NdO films.
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