Edge roughness analysis in nanoscale for single-molecule localization microscopy images.

The recent advances in super-resolution fluorescence microscopy, including single-molecule localization microscopy (SMLM), has enabled the study of previously inaccessible details, such as the organization of proteins within cellular compartments and even nanostructures in nonbiological nanomaterials, such as the polymers and semiconductors. With such developments, the need for the development of various computational nanostructure analysis methods for SMLM images is also increasing; however, this has been limited to protein cluster analysis. In this study, we developed an edge structure analysis method for pointillistic SMLM images based on the line edge roughness and power spectral density analyses.

Lens-free reflective topography for high-resolution wafer inspection.

The demand for high-resolution and large-area imaging systems for non-destructive wafer inspection has grown owing to the increasing complexity and extremely fine nature of semiconductor processes. Several studies have focused on developing high-resolution imaging systems; however, they were limited by the tradeoff between image resolution and field of view. Hence, computational imaging has arisen as an alternative method to conventional optical imaging, aimed at enhancing the aforementioned parameters.

Fourier ptychographic topography.

Topography measurement is essential for surface characterization, semiconductor metrology, and inspection applications. To date, performing high-throughput and accurate topography remains challenging due to the trade-off between field-of-view (FOV) and spatial resolution. Here we demonstrate a novel topography technique based on the reflection-mode Fourier ptychographic microscopy, termed Fourier ptychograhpic topography (FPT).

Multi spectral holographic ellipsometry for a complex 3D nanostructure.

We present an innovative ellipsometry technique called self-interferometric pupil ellipsometry (SIPE), which integrates self-interference and pupil microscopy techniques to provide the high metrology sensitivity required for metrology applications of advanced semiconductor devices. Due to its unique configuration, rich angle-resolved ellipsometric information from a single-shot hologram can be extracted, where the full spectral information corresponding to incident angles from 0° to 70° with azimuthal angles from 0° to 360° is obtained, simultaneously. The performance and capability of the SIPE system were fully validated for various samples including thin-film layers, complicated 3D structures, and on-cell overlay samples on the actual semiconductor wafers.

Controlled generation of single photons in a coupled atom-cavity system at a fast repetition-rate.

We have demonstrated high-speed controlled generation of single photons in a coupled atom-cavity system. A single 85Rb atom, pumped with a nanosecond-pulse laser, generates a single photon into the cavity mode, and the photon is then emitted out the cavity rapidly. By employing cavity parameters for a moderate coupling regime, the single-photon emission process was optimized for both high efficiency and fast bit rates up to 10 MHz.

Tunneling-induced spectral broadening of a single atom in a three-dimensional optical lattice.

We have investigated the spectral broadening in the near-resonance fluorescence spectrum of a single rubidium atom trapped in a three-dimensional (3D) optical lattice in a strong Lamb-Dicke regime. Besides the strong Rayleigh peak, the spectrum exhibited weak Stokes and anti-Stokes Raman sidebands. The line width of the Rayleigh peak for low potential depths was well explained by matter-wave tunneling between the first-two lowest vibrational states of 3D anisotropic harmonic potentials of adjacent local minima of the optical lattice.

Continuous control of the coupling constant in an atom-cavity system by using elliptic polarization and magnetic sublevels.

Atom-cavity coupling constant is a key parameter in cavity quantum electrodynamics for describing the interaction between an atom and a quantized electromagnetic field in a cavity. This paper reports a novel way to tune the coupling constant continuously by inducing an averaging of the atomic dipole moment over degenerate magnetic sublevels with elliptic polarization of the cavity field. We present an analytic solution of the stationary-state density matrix for this system with consideration of F -> F +1 hyperfine transition under a weak excitation condition.

Quasieigenstate coalescence in an atom-cavity quantum composite.

We report the first direct observation of an exceptional point (EP) in an open quantum composite of a single atom and a high-Q cavity mode. The atom-cavity coupling constant was made a continuous variable by utilizing the multisublevel nature of a single rubidium atom when it is optimally coupled to the cavity mode. The spectroscopic properties of quasieigenstates of the atom-cavity composite were experimentally investigated near the EP.