itom: an open source metrology, automation, and data evaluation software.

Modern optical sensors and measurement systems usually are a powerful combination of optical elements, active hardware components like actuators or sensing devices as well as a sophisticated control software and data evaluation algorithms. In order to develop and operate such systems, it is necessary to have a flexible, intuitive, and fast underlying software framework that also allows for rapid prototyping of a sensor in a dynamic lab environment. This software must be able to control and communicate with all necessary hardware devices and has to provide all the highly performant evaluation, data, and image processing algorithms required.

Improved signal model for confocal sensors accounting for object depending artifacts.

The conventional signal model of confocal sensors is well established and has proven to be exceptionally robust especially when measuring rough surfaces. Its physical derivation however is explicitly based on plane surfaces or point like objects, respectively. Here we show experimental results of a confocal point sensor measurement of a surface standard.

Laterally chromatically dispersed, spectrally encoded interferometer.

We present a single-shot line sensor based on spectral interferometry. Light of a broadband laser source is chromatically dispersed by a grating and focused onto a line on the surface such that each focal point on this line is formed by another wavelength. The entire height profile is obtained by applying a phase evaluation algorithm to the registered interference signal, followed by a model-based approach.