PZT-Actuated and -Sensed Resonant Micromirrors with Large Scan Angles Applying Mechanical Leverage Amplification for Biaxial Scanning.

This article presents design, fabrication and characterization of lead zirconate titanate (PZT)-actuated micromirrors, which enable extremely large scan angle of up to 106° and high frequency of 45 kHz simultaneously. Besides the high driving torque delivered by PZT actuators, mechanical leverage amplification has been applied for the micromirrors in this work to reach large displacements consuming low power. Additionally, fracture strength and failure behavior of poly-Si, which is the basic material of the micromirrors, have been studied to optimize the designs and prevent the device from breaking due to high mechanical stress.

Direct Growth of Freestanding ZnO Tetrapod Networks for Multifunctional Applications in Photocatalysis, UV Photodetection, and Gas Sensing.

Growth of freestanding nano- and microstructures with complex morphologies is a highly desired aspect for real applications of nanoscale materials in various technologies. Zinc oxide tetrapods (ZnO-T), which exhibit three-dimensional (3D) shapes, are of major importance from a technological applications point of view, and thus efficient techniques for growth of different varieties of tetrapod-based networks are demanded. Here, we demonstrate the versatile and single-step synthesis of ZnO-T with different arm morphologies by a simple flame transport synthesis (FTS) approach, forming a network.

Single step integration of ZnO nano- and microneedles in Si trenches by novel flame transport approach: whispering gallery modes and photocatalytic properties.

Direct growth of quasi-one-dimensional nano- and microstructures in desired places of complex shaped substrates using simple growth methods is highly demanded aspect for various applications. In this work, we have demonstrated direct integration of ZnO nano- and microneedles into Si trenches by a novel flame transport synthesis approach in a single fabrication step. Growth of partially and fully covered or filled trenches in Si substrate with ZnO nano- and microneedles has been investigated and is discussed here.