Evaluation of the Diagnostic Sensitivity of Digital Vibration Sensors Based on Capacitive MEMS Accelerometers.

In recent years, there has been an increasing use of digital vibration sensors that are based on capacitive MEMS accelerometers for machine vibration monitoring and diagnostics. These sensors simplify the design of monitoring and diagnostic systems, thus reducing implementation costs. However, it is important to understand how effective these digital sensors are in detecting rolling bearing faults.